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Equation Icon  Sϕ(f) = 10 −28 f −2∕3 + 6.3 × 10 −37 f −3.4 Hz− 1 (101 ) proof mass −48 −2 −1 S (f) = 2.5 × 10 f Hz (102 ) Soptical path(f) = 1.8 × 10−37f2 Hz −1 (103 )