Copyright © 2012 Ming-Hung Hsu. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The dynamic problems of a microactuator with a single edge crack are numerically formulated using radial basis functions. The microactuator model incorporates the taper ratio, electrode shapes, and crack length, all of which govern the dynamic behavior of microactuators. To optimize the design of a microactuator, many characteristics of various shaped cantilevers and curved electrodes are also investigated.